P

Inventor

RENWICK STEPHEN P

US7 patents
⚠️ This page may combine multiple inventors who share the name “RENWICK STEPHEN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

4 patents
US10871708B2Dec 22, 2020

Spatial-frequency matched wafer alignment marks, wafer alignment and overlay measurement and processing using multiple different mark designs on a single layer

NIKON CORP2 citations69
US11061338B2Jul 13, 2021

High-resolution position encoder with image sensor and encoded target pattern

NIKON CORP3 citations65
US11099483B2Aug 24, 2021

Euv lithography system for dense line patterning

NIKON CORP1 citations62
US10890849B2Jan 12, 2021

EUV lithography system for dense line patterning

NIKON CORP1 citations62

RENWICK STEPHEN P

2 patents
US8438507B2May 7, 2013

Systems and methods for adjusting a lithographic scanner

RENWICK STEPHEN P6 citations68
US8300214B2Oct 30, 2012

System and method for an adjusting optical proximity effect for an exposure apparatus

RENWICK STEPHEN P0 citations45

NIKON PREC INC

1 patent
US6943882B2Sep 13, 2005

Method to diagnose imperfections in illuminator of a lithographic tool

NIKON PREC INC8 citations64