Inventor
SCHMITT FRANCIMAR
US7 patents
⚠️ This page may combine multiple inventors who share the name “SCHMITT FRANCIMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7422776B2Sep 9, 2008
Low temperature process to produce low-K dielectrics with low stress by plasma-enhanced chemical vapor deposition (PECVD)
APPLIED MATERIALS INC33 citations91
US7611996B2Nov 3, 2009
Multi-stage curing of low K nano-porous films
APPLIED MATERIALS INC10 citations83
US7259111B2Aug 21, 2007
Interface engineering to improve adhesion between low k stacks
APPLIED MATERIALS INC14 citations83
US7189658B2Mar 13, 2007
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
APPLIED MATERIALS INC11 citations82
US7273823B2Sep 25, 2007
Situ oxide cap layer development
APPLIED MATERIALS INC3 citations62
US7547643B2Jun 16, 2009
Techniques promoting adhesion of porous low K film to underlying barrier layer
APPLIED MATERIALS INC6 citations59