Inventor
MATZ PHILLIP D
US10 patents
Patents
10 patentsUS6838300B2Jan 4, 2005
Chemical treatment of low-k dielectric films
TEXAS INSTRUMENTS INC34 citations91
US7179747B2Feb 20, 2007
Use of supercritical fluid for low effective dielectric constant metallization
TEXAS INSTRUMENTS INC17 citations83
US7642619B2Jan 5, 2010
Air gap in integrated circuit inductor fabrication
TEXAS INSTRUMENTS INC8 citations82
US7189615B2Mar 13, 2007
Single mask MIM capacitor and resistor with in trench copper drift barrier
TEXAS INSTRUMENTS INC18 citations81
US7115467B2Oct 3, 2006
Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect
TEXAS INSTRUMENTS INC9 citations72
US7485963B2Feb 3, 2009
Use of supercritical fluid for low effective dielectric constant metallization
TEXAS INSTRUMENTS INC2 citations62
US7067441B2Jun 27, 2006
Damage-free resist removal process for ultra-low-k processing
TEXAS INSTRUMENTS INC5 citations62
US7781884B2Aug 24, 2010
Method of fabrication of on-chip heat pipes and ancillary heat transfer components
TEXAS INSTRUMENTS INC5 citations61
US7566627B2Jul 28, 2009
Air gap in integrated circuit inductor fabrication
TEXAS INSTRUMENTS INC5 citations61
US7037823B2May 2, 2006
Method to reduce silanol and improve barrier properties in low k dielectric ic interconnects
TEXAS INSTRUMENTS INC0 citations48