Inventor

JOHO YASUHIRO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “JOHO YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US10535543B2Jan 14, 2020

Teaching jig, substrate processing apparatus, and teaching method

HITACHI INT ELECTRIC INC2 citations68

US7930049B2Apr 19, 2011

Control method for a substrate processing apparatus

HITACHI INT ELECTRIC INC2 citations56

KOYAMA YOSHITAKA

1 patent

US9104196B2Aug 11, 2015

Substrate processing system and group managing apparatus

KOYAMA YOSHITAKA3 citations53

KOKUSAI ELECTRIC CORP

1 patent

US12080149B2Sep 3, 2024

Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations46

YAMAGUCHI HIDETO

1 patent

US8266095B2Sep 11, 2012

Substrate processing system and operation inspecting method

YAMAGUCHI HIDETO0 citations31