Inventor
FAEYRMAN MICHAEL
IL10 patents
⚠️ This page may combine multiple inventors who share the name “FAEYRMAN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS7656528B2Feb 2, 2010
Periodic patterns and technique to control misalignment between two layers
KLA TENCOR CORP60 citations97
US6172349B1Jan 9, 2001
Autofocusing apparatus and method for high resolution microscope system
KLA TENCOR CORP150 citations94
US9476698B2Oct 25, 2016
Periodic patterns and technique to control misalignment between two layers
KLA TENCOR CORP22 citations92
US10151584B2Dec 11, 2018
Periodic patterns and technique to control misalignment between two layers
KLA TENCOR CORP0 citations51
US9835447B2Dec 5, 2017
Periodic patterns and technique to control misalignment between two layers
KLA TENCOR CORP0 citations51
US9234745B2Jan 12, 2016
Periodic patterns and techniques to control misalignment between two layers
KLA TENCOR CORP0 citations51
US9103662B2Aug 11, 2015
Periodic patterns and technique to control misalignment between two layers
KLA TENCOR CORP0 citations51