Inventor
TORIGOE KAZUHISA
JP7 patents
Patents
7 patentsUS11695048B2Jul 4, 2023
Silicon wafer and manufacturing method of the same
SUMCO CORP2 citations67
US11888036B2Jan 30, 2024
Method for setting a nitrogen concentration of a silicon epitaxial film in manufacturing an epitaxial silicon wafer
SUMCO CORP0 citations60
US12142645B2Nov 12, 2024
Silicon wafer and manufacturing method of the same
SUMCO CORP0 citations56
US11121003B2Sep 14, 2021
Method of predicting thermal donor formation behavior in silicon wafer, method of evaluating silicon wafer, and method of producing silicon wafer
SUMCO CORP0 citations50
US10861990B2Dec 8, 2020
Epitaxial silicon wafer
SUMCO CORP0 citations49
US9281216B2Mar 8, 2016
Manufacturing method of epitaxial silicon wafer
SUMCO CORP0 citations49
US9818609B2Nov 14, 2017
Epitaxial-silicon-wafer manufacturing method and epitaxial silicon wafer
SUMCO CORP0 citations39