Inventor
ZIEGLER GERHARD-WILHELM
DE13 patents
⚠️ This page may combine multiple inventors who share the name “ZIEGLER GERHARD-WILHELM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
11 patentsUS9599904B2Mar 21, 2017
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH15 citations92
US9280060B2Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH5 citations82
US10191382B2Jan 29, 2019
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH1 citations72
US9310694B2Apr 12, 2016
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH3 citations72
US9454085B2Sep 27, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations62
US9091945B2Jul 28, 2015
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH3 citations62
US9606441B2Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH1 citations61
US9933706B2Apr 3, 2018
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations52
US9977333B2May 22, 2018
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US9645388B2May 9, 2017
Facet mirror device
ZEISS CARL SMT GMBH0 citations51
US10088754B2Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH0 citations50