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Inventor
KERN MIRCO
DE
4 patents
⚠️ This page may combine multiple inventors who share the name “KERN MIRCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patents
US9280060B2
Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH
5 citations
82
US9606441B2
Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH
1 citations
61
US10088754B2
Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH
0 citations
50
SCHOLZ AXEL
1 patent
US8873023B2
Oct 28, 2014
Illumination system for microlithography
SCHOLZ AXEL
4 citations
80