Inventor
KELLNER STEPHAN
DE6 patents
⚠️ This page may combine multiple inventors who share the name “KELLNER STEPHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS9280060B2Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH5 citations82
US9606441B2Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH1 citations61
US10088754B2Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH0 citations50
US9448490B2Sep 20, 2016
EUV lithography system
ZEISS CARL SMT GMBH0 citations39