Inventor

WALLDORF DANIEL

DE7 patents

⚠️ This page may combine multiple inventors who share the name “WALLDORF DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

4 patents

US9280060B2Mar 8, 2016

Illumination system for microlithography

ZEISS CARL SMT GMBH5 citations82

US10151982B2Dec 11, 2018

Illumination system of a microlithographic projection exposure apparatus with a birefringent element

ZEISS CARL SMT GMBH2 citations71

US9606441B2Mar 28, 2017

Illumination system for microlithography

ZEISS CARL SMT GMBH1 citations61

US10088754B2Oct 2, 2018

Illumination system for microlithography

ZEISS CARL SMT GMBH0 citations50

SCHOLZ AXEL

1 patent

US8873023B2Oct 28, 2014

Illumination system for microlithography

SCHOLZ AXEL4 citations80

TE CONNECTIVITY GERMANY GMBH

1 patent

US10403995B2Sep 3, 2019

Electrical connector, electronic component, and assembly method

TE CONNECTIVITY GERMANY GMBH1 citations53

FIOLKA DAMIAN

1 patent

US9316920B2Apr 19, 2016

Illumination system of a microlithographic projection exposure apparatus with a birefringent element

FIOLKA DAMIAN0 citations51