Inventor
ELMER JAMES R B
US9 patents
⚠️ This page may combine multiple inventors who share the name “ELMER JAMES R B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
8 patentsUS6856029B1Feb 15, 2005
Process independent alignment marks
LSI LOGIC CORP42 citations95
US6710851B1Mar 23, 2004
Multi pattern reticle
LSI LOGIC CORP25 citations88
US6818516B1Nov 16, 2004
Selective high k dielectrics removal
LSI LOGIC CORP14 citations83
US7095483B2Aug 22, 2006
Process independent alignment marks
LSI LOGIC CORP7 citations72
US6964924B1Nov 15, 2005
Integrated circuit process monitoring and metrology system
LSI LOGIC CORP3 citations61
US7115425B2Oct 3, 2006
Integrated circuit process monitoring and metrology system
LSI LOGIC CORP0 citations51
US6472316B1Oct 29, 2002
Photolithography overlay control
LSI LOGIC CORP0 citations40
US7016041B2Mar 21, 2006
Reticle overlay correction
LSI LOGIC CORP0 citations39