Inventor
WU XINGTAO
US5 patents
⚠️ This page may combine multiple inventors who share the name “WU XINGTAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WU XINGTAO
3 patentsUS8724200B1May 13, 2014
MEMS hierarchically-dimensioned optical mirrors and methods for manufacture thereof
WU XINGTAO36 citations90
US8139280B2Mar 20, 2012
MEMS hierarchically-dimensioned deformable mirror
WU XINGTAO15 citations80
US10727393B1Jul 28, 2020
Stack actuators array and deformable mirrors by utilizing wafer dicing, conductor refilling, and hybrid integrating and assembly techniques
WU XINGTAO1 citations58