Inventor
KIRCHNER ERIC J
US9 patents
Patents
9 patentsUS6692338B1Feb 17, 2004
Through-pad drainage of slurry during chemical mechanical polishing
LSI LOGIC CORP118 citations96
US5888121AMar 30, 1999
Controlling groove dimensions for enhanced slurry flow
LSI LOGIC CORP95 citations96
US6254456B1Jul 3, 2001
Modifying contact areas of a polishing pad to promote uniform removal rates
LSI LOGIC CORP26 citations91
US6093280AJul 25, 2000
Chemical-mechanical polishing pad conditioning systems
LSI LOGIC CORP50 citations91
US5913715AJun 22, 1999
Use of hydrofluoric acid for effective pad conditioning
LSI LOGIC CORP30 citations91
US5835226ANov 10, 1998
Method for determining optical constants prior to film processing to be used improve accuracy of post-processing thickness measurements
LSI LOGIC CORP52 citations90
US6964924B1Nov 15, 2005
Integrated circuit process monitoring and metrology system
LSI LOGIC CORP3 citations61
US7115425B2Oct 3, 2006
Integrated circuit process monitoring and metrology system
LSI LOGIC CORP0 citations51
US6472316B1Oct 29, 2002
Photolithography overlay control
LSI LOGIC CORP0 citations40