Inventor
ONODA MASATOSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ONODA MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSIN ION EQUIPMENT CO LTD
7 patentsUS7367139B2May 6, 2008
Vacuum processing apparatus and method operation thereof
NISSIN ION EQUIPMENT CO LTD7 citations72
US11127616B2Sep 21, 2021
Substrate accommodation device
NISSIN ION EQUIPMENT CO LTD2 citations62
US9230776B2Jan 5, 2016
Ion irradiation apparatus and ion irradiation method
NISSIN ION EQUIPMENT CO LTD2 citations59
US12249479B2Mar 11, 2025
Substrate holding device
NISSIN ION EQUIPMENT CO LTD0 citations56
US11751287B2Sep 5, 2023
Substrate heating device
NISSIN ION EQUIPMENT CO LTD0 citations51
US9784317B2Oct 10, 2017
Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method
NISSIN ION EQUIPMENT CO LTD0 citations49
US11776839B2Oct 3, 2023
Substrate holding device
NISSIN ION EQUIPMENT CO LTD0 citations46