Inventor
HA KANG RAE
KR3 patents
Patents
3 patentsUS11139195B2Oct 5, 2021
Lift pin unit and substrate supporting unit having the same
SEMES CO LTD2 citations69
US9909197B2Mar 6, 2018
Supporting unit and substrate treating apparatus including the same
SEMES CO LTD3 citations65
US11056320B2Jul 6, 2021
Substrate treating apparatus, substrate support unit, and substrate treating method
SEMES CO LTD0 citations46