Inventor
HANEKAWA HIROSHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “HANEKAWA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGC INC
14 patentsUS11698580B2Jul 11, 2023
Reflective mask blank for EUV lithography
AGC INC2 citations71
US10241390B2Mar 26, 2019
Reflective mask blank and process for producing the reflective mask blank
AGC INC5 citations71
US11150550B2Oct 19, 2021
Reflective mask blank and reflective mask
AGC INC2 citations69
US12216398B2Feb 4, 2025
Reflective mask blank and reflective mask
AGC INC0 citations62
US11914283B2Feb 27, 2024
Reflective mask blank and reflective mask
AGC INC0 citations62
US12235575B2Feb 25, 2025
Reflective mask blank for EUV lithography and substrate with conductive film
AGC INC0 citations61
US12038685B2Jul 16, 2024
Reflective mask blank for EUV lithography
AGC INC0 citations61
US11934093B2Mar 19, 2024
Reflective mask blank for EUV lithography and substrate with conductive film
AGC INC0 citations61
US11703751B2Jul 18, 2023
Reflective mask blank and reflective mask
AGC INC0 citations58
US11982935B2May 14, 2024
Reflective mask blank for EUV lithography
AGC INC0 citations57
US12124164B2Oct 22, 2024
Reflective mask blank and reflective mask
AGC INC0 citations56
US12032280B2Jul 9, 2024
Reflective mask blank, reflective mask, and method for manufacturing reflective mask
AGC INC0 citations56
US11036127B2Jun 15, 2021
Reflective mask blank and reflective mask
AGC INC0 citations50
US10634887B2Apr 28, 2020
Protective film, reflective member, and method for producing protective film
AGC INC0 citations50
ASAHI GLASS CO LTD
5 patentsUS10239783B2Mar 26, 2019
Method of producing glass substrate and glass substrate
ASAHI GLASS CO LTD0 citations49
US10204767B2Feb 12, 2019
Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source
ASAHI GLASS CO LTD0 citations49
US9988303B2Jun 5, 2018
Coating film-equipped glass substrate, and method for producing coating film-equipped glass substrate
ASAHI GLASS CO LTD0 citations49
US9922805B2Mar 20, 2018
Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source
ASAHI GLASS CO LTD0 citations49
US9927693B2Mar 27, 2018
Reflective mask blank and process for producing the reflective mask blank
ASAHI GLASS CO LTD0 citations41