Inventor
CHUNG CHIEN-MING
TW5 patents
Patents
5 patentsUS5824457AOct 20, 1998
Use of WEE (wafer edge exposure) to prevent polyimide contamination
TAIWAN SEMICONDUCTOR MFG45 citations93
US6972222B2Dec 6, 2005
Temporary self-aligned stop layer is applied on silicon sidewall
TAIWAN SEMICONDUCTOR MFG10 citations72
US6214441B1Apr 10, 2001
Use of wee (water edge exposure) to prevent polyimide
TAIWAN SEMICONDUCTOR MFG11 citations70
US6734085B1May 11, 2004
Anti-type dosage as LDD implant
TAIWAN SEMICONDUCTOR MFG4 citations61
US6841460B2Jan 11, 2005
Anti-type dosage as LDD implant
TAIWAN SEMICONDUCTOR MFG0 citations51