Inventor

EWALD ROBERT A

US2 patents

⚠️ This page may combine multiple inventors who share the name “EWALD ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON VALLEY GROUP THERMAL

1 patent

US6143080ANov 7, 2000

Wafer processing reactor having a gas flow control system and method

SILICON VALLEY GROUP THERMAL70 citations93

APPLIED MATERIALS INC

1 patent

US8012000B2Sep 6, 2011

Extended pad life for ECMP and barrier removal

APPLIED MATERIALS INC2 citations61