Inventor
LII YEONG-JYH TOM
US6 patents
Patents
6 patentsUS6004850ADec 21, 1999
Tantalum oxide anti-reflective coating (ARC) integrated with a metallic transistor gate electrode and method of formation
MOTOROLA INC58 citations94
US5888588AMar 30, 1999
Process for forming a semiconductor device
MOTOROLA INC62 citations94
US6686633B1Feb 3, 2004
Semiconductor device, memory cell, and processes for forming them
MOTOROLA INC16 citations91
US6184073B1Feb 6, 2001
Process for forming a semiconductor device having an interconnect or conductive film electrically insulated from a conductive member or region
MOTOROLA INC27 citations91
US6294820B1Sep 25, 2001
Metallic oxide gate electrode stack having a metallic gate dielectric metallic gate electrode and a metallic arc layer
MOTOROLA INC33 citations90
US6146948ANov 14, 2000
Method for manufacturing a thin oxide for use in semiconductor integrated circuits
MOTOROLA INC42 citations86