Inventor
LICATA THOMAS J
US15 patents
⚠️ This page may combine multiple inventors who share the name “LICATA THOMAS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS6197165B1Mar 6, 2001
Method and apparatus for ionized physical vapor deposition
TOKYO ELECTRON LTD101 citations97
US6080287AJun 27, 2000
Method and apparatus for ionized physical vapor deposition
TOKYO ELECTRON LTD121 citations97
US6132564AOct 17, 2000
In-situ pre-metallization clean and metallization of semiconductor wafers
TOKYO ELECTRON LTD62 citations96
US5800688ASep 1, 1998
Apparatus for ionized sputtering
TOKYO ELECTRON LTD89 citations95
US6117279ASep 12, 2000
Method and apparatus for increasing the metal ion fraction in ionized physical vapor deposition
TOKYO ELECTRON LTD151 citations93
US6224724B1May 1, 2001
Physical vapor processing of a surface with non-uniformity compensation
TOKYO ELECTRON LTD39 citations92
US6508919B1Jan 21, 2003
Optimized liners for dual damascene metal wiring
TOKYO ELECTRON LTD19 citations84
US6395095B1May 28, 2002
Process apparatus and method for improved plasma processing of a substrate
TOKYO ELECTRON LTD14 citations80
US6730605B2May 4, 2004
Redistribution of copper deposited films
TOKYO ELECTRON LTD5 citations61
IBM
5 patentsUS5576579ANov 19, 1996
Tasin oxygen diffusion barrier in multilayer structures
IBM83 citations96
US5466626ANov 14, 1995
Micro mask comprising agglomerated material
IBM50 citations94
US5356837AOct 18, 1994
Method of making epitaxial cobalt silicide using a thin metal underlayer
IBM39 citations92
US6200894B1Mar 13, 2001
Method for enhancing aluminum interconnect properties
IBM7 citations74
US5545590AAug 13, 1996
Conductive rie-resistant collars for studs beneath rie-defined wires
IBM12 citations73