Inventor
CARRUTHERS ROY ARTHUR
US13 patents
Patents
13 patentsUS6815329B2Nov 9, 2004
Multilayer interconnect structure containing air gaps and method for making
IBM105 citations97
US6503833B1Jan 7, 2003
Self-aligned silicide (salicide) process for strained silicon MOSFET ON SiGe and structure formed thereby
IBM83 citations95
US6440851B1Aug 27, 2002
Method and structure for controlling the interface roughness of cobalt disilicide
IBM57 citations95
US6323130B1Nov 27, 2001
Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridging
IBM59 citations94
US7098476B2Aug 29, 2006
Multilayer interconnect structure containing air gaps and method for making
IBM39 citations92
US6753606B2Jun 22, 2004
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy
IBM13 citations92
US6444578B1Sep 3, 2002
Self-aligned silicide process for reduction of Si consumption in shallow junction and thin SOI electronic devices
IBM50 citations92
US6331486B1Dec 18, 2001
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy
IBM21 citations92
US6413859B1Jul 2, 2002
Method and structure for retarding high temperature agglomeration of silicides using alloys
IBM26 citations91
US7081676B2Jul 25, 2006
Structure for controlling the interface roughness of cobalt disilicide
IBM5 citations73
US7102234B2Sep 5, 2006
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy
IBM3 citations63
US6809030B2Oct 26, 2004
Method and structure for controlling the interface roughness of cobalt disilicide
IBM2 citations62
US6503641B2Jan 7, 2003
Interconnects with Ti-containing liners
IBM5 citations62