Inventor
PURTELL ROBERT JOSEPH
US5 patents
Patents
5 patentsUS5976264ANov 2, 1999
Removal of fluorine or chlorine residue by liquid CO2
IBM142 citations96
US5908510AJun 1, 1999
Residue removal by supercritical fluids
IBM206 citations96
US6440851B1Aug 27, 2002
Method and structure for controlling the interface roughness of cobalt disilicide
IBM57 citations95
US7081676B2Jul 25, 2006
Structure for controlling the interface roughness of cobalt disilicide
IBM5 citations73
US6809030B2Oct 26, 2004
Method and structure for controlling the interface roughness of cobalt disilicide
IBM2 citations62