Inventor
JORDAN-SWEET JEAN LOUISE
US3 patents
Patents
3 patentsUS6440851B1Aug 27, 2002
Method and structure for controlling the interface roughness of cobalt disilicide
IBM57 citations95
US7081676B2Jul 25, 2006
Structure for controlling the interface roughness of cobalt disilicide
IBM5 citations73
US6809030B2Oct 26, 2004
Method and structure for controlling the interface roughness of cobalt disilicide
IBM2 citations62