Inventor

YABUSAME TATSUYA

JP2 patents

Patents

2 patents

US7001456B2Feb 21, 2006

Apparatus and method for supplying Crystalline materials in czochralski method

SUMITOMO MITSUBISHI SILICON5 citations53

US6689213B2Feb 10, 2004

Single crystal pulling apparatus

SUMITOMO MITSUBISHI SILICON1 citations42