Inventor
BATTLE SCOTT
US5 patents
⚠️ This page may combine multiple inventors who share the name “BATTLE SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
3 patentsUS6921062B2Jul 26, 2005
Vaporizer delivery ampoule
ADVANCED TECH MATERIALS189 citations96
US7108771B2Sep 19, 2006
Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films
ADVANCED TECH MATERIALS24 citations90
US8053375B1Nov 8, 2011
Super-dry reagent compositions for formation of ultra low k films
ADVANCED TECH MATERIALS0 citations41