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Inventor
MAGG CHRISTOPHER KARL
US
2 patents
Patents
2 patents
US6543617B2
Apr 8, 2003
Packaged radiation sensitive coated workpiece process for making and method of storing same
IBM
16 citations
90
US7168224B2
Jan 30, 2007
Method of making a packaged radiation sensitive resist film-coated workpiece
IBM
4 citations
60