Inventor
ZHANG BEICHAO
SG7 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG BEICHAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
6 patentsUS7045455B2May 16, 2006
Via electromigration improvement by changing the via bottom geometric profile
CHARTERED SEMICONDUCTOR MFG17 citations91
US6653227B1Nov 25, 2003
Method of cobalt silicidation using an oxide-Titanium interlayer
CHARTERED SEMICONDUCTOR MFG21 citations89
US7601607B2Oct 13, 2009
Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects
CHARTERED SEMICONDUCTOR MFG8 citations80
US7670946B2Mar 2, 2010
Methods to eliminate contact plug sidewall slit
CHARTERED SEMICONDUCTOR MFG4 citations61
US7153766B2Dec 26, 2006
Metal barrier cap fabrication by polymer lift-off
CHARTERED SEMICONDUCTOR MFG4 citations61
US7323408B2Jan 29, 2008
Metal barrier cap fabrication by polymer lift-off
CHARTERED SEMICONDUCTOR MFG0 citations51