Inventor
AMADA HARUO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “AMADA HARUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5134962AAug 4, 1992
Spin coating apparatus
HITACHI LTD146 citations95
US4593168AJun 3, 1986
Method and apparatus for the heat-treatment of a plate-like member
HITACHI LTD49 citations95
US5857661AJan 12, 1999
Valve drive control method, valve drive control apparatus and fluid member supply apparatus
HITACHI LTD47 citations92
US4667076AMay 19, 1987
Method and apparatus for microwave heat-treatment of a semiconductor water
HITACHI LTD39 citations91