Inventor
MIAO XIN
US326 patents
⚠️ This page may combine multiple inventors who share the name “MIAO XIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
47 patentsUS9362355B1Jun 7, 2016
Nanosheet MOSFET with full-height air-gap spacer
IBM198 citations99
US9899515B1Feb 20, 2018
Fabrication of a pair of vertical fin field effect transistors having a merged top source/drain
IBM46 citations98
US9859166B1Jan 2, 2018
Vertical field effect transistor having U-shaped top spacer
IBM52 citations98
US9721897B1Aug 1, 2017
Transistor with air spacer and self-aligned contact
IBM52 citations98
US9647139B2May 9, 2017
Atomic layer deposition sealing integration for nanosheet complementary metal oxide semiconductor with replacement spacer
IBM34 citations98
US9466570B1Oct 11, 2016
MOSFET with asymmetric self-aligned contact
IBM36 citations98
US9716158B1Jul 25, 2017
Air gap spacer between contact and gate region
IBM111 citations97
US11075273B1Jul 27, 2021
Nanosheet electrostatic discharge structure
IBM20 citations94
US10424639B1Sep 24, 2019
Nanosheet transistor with high-mobility channel
IBM33 citations94
US10229971B1Mar 12, 2019
Integration of thick and thin nanosheet transistors on a single chip
IBM36 citations94
US10141448B1Nov 27, 2018
Vertical FETs with different gate lengths and spacer thicknesses
IBM22 citations94
US9859409B2Jan 2, 2018
Single-electron transistor with wrap-around gate
IBM28 citations94
US9853028B1Dec 26, 2017
Vertical FET with reduced parasitic capacitance
IBM33 citations94
US9799655B1Oct 24, 2017
Flipped vertical field-effect-transistor
IBM21 citations94
US9799749B1Oct 24, 2017
Vertical transport FET devices with uniform bottom spacer
IBM30 citations94
US9761728B1Sep 12, 2017
Self-aligned source/drain junction for vertical field-effect transistor (FET) and method of forming the same
IBM33 citations94
US9748404B1Aug 29, 2017
Method for fabricating a semiconductor device including gate-to-bulk substrate isolation
IBM32 citations94
US9741717B1Aug 22, 2017
FinFETs with controllable and adjustable channel doping
IBM23 citations94
US9741626B1Aug 22, 2017
Vertical transistor with uniform bottom spacer formed by selective oxidation
IBM47 citations94
US9721845B1Aug 1, 2017
Vertical field effect transistors with bottom contact metal directly beneath fins
IBM21 citations94
US9653547B1May 16, 2017
Integrated etch stop for capped gate and method for manufacturing the same
IBM22 citations94
US9607899B1Mar 28, 2017
Integration of vertical transistors with 3D long channel transistors
IBM22 citations94
US9515138B1Dec 6, 2016
Structure and method to minimize junction capacitance in nano sheets
IBM33 citations94
US10090412B1Oct 2, 2018
Vertical transistor with back bias and reduced parasitic capacitance
IBM15 citations93
US10083871B2Sep 25, 2018
Fabrication of a vertical transistor with self-aligned bottom source/drain
IBM16 citations93
US9911592B2Mar 6, 2018
Method for making nanosheet CMOS device integrating atomic layer deposition process and replacement gate structure
IBM13 citations93
US9853132B2Dec 26, 2017
Nanosheet MOSFET with full-height air-gap spacer
IBM17 citations93
US9806155B1Oct 31, 2017
Split fin field effect transistor enabling back bias on fin type field effect transistors
IBM13 citations93
US9768085B1Sep 19, 2017
Top contact resistance measurement in vertical FETs
IBM17 citations93
US9735269B1Aug 15, 2017
Integrated strained stacked nanosheet FET
IBM12 citations93
US9508829B1Nov 29, 2016
Nanosheet MOSFET with full-height air-gap spacer
IBM22 citations93
US9437501B1Sep 6, 2016
Stacked nanowire device width adjustment by gas cluster ion beam (GCIB)
IBM21 citations93
US10566445B2Feb 18, 2020
Gate spacer and inner spacer formation for nanosheet transistors having relatively small space between gates
IBM11 citations86
US11195911B2Dec 7, 2021
Bottom dielectric isolation structure for nanosheet containing devices
IBM8 citations84
US10886368B2Jan 5, 2021
I/O device scheme for gate-all-around transistors
IBM7 citations84
US10777469B2Sep 15, 2020
Self-aligned top spacers for vertical FETs with in situ solid state doping
IBM8 citations84
US10756216B2Aug 25, 2020
Nanosheet mosfet with isolated source/drain epitaxy and close junction proximity
IBM10 citations84
US10658481B1May 19, 2020
Self-aligned gate cut in direct stacked vertical transport field effect transistor (VTFET)
IBM7 citations84
US10615256B2Apr 7, 2020
Nanosheet transistor gate structure having reduced parasitic capacitance
IBM7 citations84
US10615258B2Apr 7, 2020
Nanosheet semiconductor structure with inner spacer formed by oxidation
IBM5 citations84
US10559502B2Feb 11, 2020
Fabrication of a pair of vertical fin field effect transistors having a merged top source/drain
IBM4 citations84
US10505019B1Dec 10, 2019
Vertical field effect transistors with self aligned source/drain junctions
IBM6 citations84
US10505048B1Dec 10, 2019
Self-aligned source/drain contact for vertical field effect transistor
IBM7 citations84
US10468532B1Nov 5, 2019
Nanosheet substrate isolation scheme by lattice matched wide bandgap semiconductor
IBM7 citations84
US10388577B1Aug 20, 2019
Nanosheet devices with different types of work function metals
IBM6 citations84
US10361200B1Jul 23, 2019
Vertical fin field effect transistor with integral U-shaped electrical gate connection
IBM8 citations84
US10340364B2Jul 2, 2019
H-shaped VFET with increased current drivability
IBM11 citations84
NAMSARAEV EUGENI A
1 patentINET TECHNOLOGIES INC
1 patentMAMMOTH BIOSCIENCES INC
1 patentShowing the top 50 of 326 patents by PatentIndex Score.