Inventor
TAKAYAMA WATARU
JP7 patents
Patents
7 patentsUS10707090B2Jul 7, 2020
Plasma etching method
TOKYO ELECTRON LTD41 citations92
US9666446B2May 30, 2017
Etching method
TOKYO ELECTRON LTD43 citations92
US9966273B2May 8, 2018
Plasma etching method
TOKYO ELECTRON LTD3 citations71
US10692729B2Jun 23, 2020
Etching process method
TOKYO ELECTRON LTD2 citations70
US9779961B2Oct 3, 2017
Etching method
TOKYO ELECTRON LTD4 citations69
US9230824B2Jan 5, 2016
Method of manufacturing semiconductor device
TOKYO ELECTRON LTD2 citations55
US10867777B2Dec 15, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47