Inventor
MORIHANA TOSHIMITSU
JP4 patents
Patents
4 patentsUS9916997B2Mar 13, 2018
End structure of nozzle, purging device, and load port
SINFONIA TECHNOLOGY CO LTD6 citations70
US9239228B2Jan 19, 2016
Wafer mapping apparatus and load port including same
SINFONIA TECHNOLOGY CO LTD3 citations69
US11139188B2Oct 5, 2021
Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus
SINFONIA TECHNOLOGY CO LTD0 citations48
US10923377B2Feb 16, 2021
Load port and method of detecting abnormality in FOUP lid of load port
SINFONIA TECHNOLOGY CO LTD0 citations45