Inventor
LEE LI-YU
TW7 patents
Patents
7 patentsUS11081445B2Aug 3, 2021
Semiconductor device comprising air gaps having different configurations
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10879179B2Dec 29, 2020
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10157843B2Dec 18, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US9852992B2Dec 26, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11676895B2Jun 13, 2023
Semiconductor device comprising air gaps having different configurations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11355436B2Jun 7, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10361156B2Jul 23, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47