Inventor

KIM JIKANG

KR2 patents

Patents

2 patents

US12281243B2Apr 22, 2025

Method of removing an adhesive for an EUV mask and method of reusing an EUV mask

SAMSUNG ELECTRONICS CO LTD0 citations42

US10087348B2Oct 2, 2018

Pellicle including a water-soluble adhesive and photomask assembly including the pellicle

SAMSUNG ELECTRONICS CO LTD0 citations41