Inventor
CHANG SHAO HUA
JP21 patents
Patents
21 patentsUS12270120B2Apr 8, 2025
Plating apparatus and plating method
EBARA CORP0 citations62
US12116687B2Oct 15, 2024
Powder supply apparatus and plating system
EBARA CORP0 citations62
US11891715B2Feb 6, 2024
Paddle, processing apparatus having the paddle, and method of producing the paddle
EBARA CORP0 citations62
US11359304B2Jun 14, 2022
Powder supply apparatus and plating system
EBARA CORP0 citations62
US10914020B2Feb 9, 2021
Wave absorbing member attachable to paddle and plating apparatus including wave absorbing member
EBARA CORP0 citations62
US11192151B2Dec 7, 2021
Cleaning device, plating device including the same, and cleaning method
EBARA CORP0 citations61
US11725296B2Aug 15, 2023
Plate, plating apparatus, and method of manufacturing plate
EBARA CORP0 citations60
US11717796B2Aug 8, 2023
Paddle, plating apparatus equipped with the paddle, and plating method
EBARA CORP0 citations60
US10946351B2Mar 16, 2021
Paddle, plating apparatus equipped with the paddle, and plating method
EBARA CORP0 citations60
US12247311B2Mar 11, 2025
Plating apparatus and plating process method
EBARA CORP0 citations51
US12180606B2Dec 31, 2024
Plating apparatus
EBARA CORP0 citations51
US12152311B2Nov 26, 2024
Wetting method for substrate and plating apparatus
EBARA CORP0 citations51
US12134833B2Nov 5, 2024
Plating apparatus and cleaning method of contact member of plating apparatus
EBARA CORP0 citations51
US12054840B2Aug 6, 2024
Plating apparatus, pre-wet process method, and cleaning process method
EBARA CORP0 citations51
US11906299B2Feb 20, 2024
Plating apparatus and film thickness measuring method for substrate
EBARA CORP0 citations51
US11846035B2Dec 19, 2023
Plating apparatus and plating method
EBARA CORP0 citations51
US10914019B2Feb 9, 2021
Plating apparatus and plating method
EBARA CORP0 citations51
US12077875B2Sep 3, 2024
Air bubble removing method of plating apparatus and plating apparatus
EBARA CORP0 citations50
US11603601B2Mar 14, 2023
Plating device and resistor
EBARA CORP0 citations50
US11447883B2Sep 20, 2022
Wet substrate processing device
EBARA CORP0 citations50
US11098413B2Aug 24, 2021
Plating apparatus and plating method
EBARA CORP0 citations49