Inventor

THOMAS TIM

US4 patents

⚠️ This page may combine multiple inventors who share the name “THOMAS TIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US6724002B2Apr 20, 2004

Multiple electron beam lithography system with multiple beam modulated laser illumination

APPLIED MATERIALS INC41 citations90

ETEC SYSTEMS INC

1 patent

US5327338AJul 5, 1994

Scanning laser lithography system alignment apparatus

ETEC SYSTEMS INC29 citations88

NOVELLUS SYSTEMS INC

1 patent

US8962101B2Feb 24, 2015

Methods and apparatus for plasma-based deposition

NOVELLUS SYSTEMS INC7 citations79

ATEO CORP

1 patent

US5087927AFeb 11, 1992

On-axis air gage focus system

ATEO CORP17 citations64