Inventor

CHOI JAEKWANG

KR2 patents

Patents

2 patents

US7314578B2Jan 1, 2008

Slurry compositions and CMP methods using the same

SAMSUNG ELECTRONICS CO LTD14 citations81

US7718535B2May 18, 2010

Slurry compositions and CMP methods using the same

SAMSUNG ELECTRONICS CO LTD1 citations49