Inventor

SATO TOMOKATSU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SATO TOMOKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCREEN HOLDINGS CO LTD

2 patents

US10761422B2Sep 1, 2020

Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method

SCREEN HOLDINGS CO LTD3 citations71

US10133173B2Nov 20, 2018

Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method

SCREEN HOLDINGS CO LTD1 citations51

HARADA CORP

1 patent

US7126807B2Oct 24, 2006

Ionized air flow discharge type non-dusting ionizer

HARADA CORP12 citations77

TECHNO RYOWA LTD

1 patent

US7397647B2Jul 8, 2008

Ionized gas current emission type dust-free ionizer

TECHNO RYOWA LTD8 citations66