Inventor
HAINZ JOACHIM
DE11 patents
⚠️ This page may combine multiple inventors who share the name “HAINZ JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
9 patentsUS7015489B2Mar 21, 2006
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
ZEISS CARL SMT AG36 citations95
US7460212B2Dec 2, 2008
Collector configured of mirror shells
ZEISS CARL SMT AG11 citations92
US7321126B2Jan 22, 2008
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG26 citations92
US7244954B2Jul 17, 2007
Collector having unused region for illumination systems using a wavelength ≦193 nm
ZEISS CARL SMT AG14 citations92
US7362414B2Apr 22, 2008
Optical system having an optical element that can be brought into at least two positions
ZEISS CARL SMT AG8 citations73
US7091505B2Aug 15, 2006
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG8 citations73
US7126137B2Oct 24, 2006
Illumination system with field mirrors for producing uniform scanning energy
ZEISS CARL SMT AG9 citations71
US7443948B2Oct 28, 2008
Illumination system particularly for microlithography
ZEISS CARL SMT AG2 citations62
US7405809B2Jul 29, 2008
Illumination system particularly for microlithography
ZEISS CARL SMT AG6 citations62