Inventor
SCHUBERT ERICH
DE9 patents
⚠️ This page may combine multiple inventors who share the name “SCHUBERT ERICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS9599904B2Mar 21, 2017
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH15 citations92
US10191382B2Jan 29, 2019
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH1 citations72
US9310694B2Apr 12, 2016
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH3 citations72
US9977333B2May 22, 2018
Illumination system for illuminating a mask in a microlithographic exposure apparatus
ZEISS CARL SMT GMBH0 citations51
ZEISS CARL SMT AG
3 patentsUS7321126B2Jan 22, 2008
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG26 citations92
US7091505B2Aug 15, 2006
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG8 citations73
US7405809B2Jul 29, 2008
Illumination system particularly for microlithography
ZEISS CARL SMT AG6 citations62