Inventor

DOERING HANS-JOACHIM

DE7 patents

⚠️ This page may combine multiple inventors who share the name “DOERING HANS-JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VISTEC ELECTRON BEAM GMBH

3 patents

US7741620B2Jun 22, 2010

Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate

VISTEC ELECTRON BEAM GMBH135 citations93

US7601969B2Oct 13, 2009

Illumination condenser for a particle optical projection system

VISTEC ELECTRON BEAM GMBH2 citations59

US7560713B2Jul 14, 2009

Correction lens system for a particle beam projection device

VISTEC ELECTRON BEAM GMBH5 citations59

LEICA MICROSYS LITHOGRAPHY LTD

2 patents

US6541776B1Apr 1, 2003

Device for electrostatic deflection of a particle beam

LEICA MICROSYS LITHOGRAPHY LTD2 citations59

US7491946B2Feb 17, 2009

Electrostatic deflection system for corpuscular radiation

LEICA MICROSYS LITHOGRAPHY LTD0 citations48

DOERING HANS-JOACHIM

1 patent

US8148702B2Apr 3, 2012

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

DOERING HANS-JOACHIM16 citations76

RAG AG

1 patent

US6571874B1Jun 3, 2003

Method for the in-situ extraction of gas from coal seams

RAG AG14 citations75