Inventor

HEINITZ JOACHIM

DE3 patents

⚠️ This page may combine multiple inventors who share the name “HEINITZ JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VISTEC ELECTRON BEAM GMBH

1 patent

US7741620B2Jun 22, 2010

Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate

VISTEC ELECTRON BEAM GMBH135 citations93

LEICA MICROSYS LITHOGRAPHY LTD

1 patent

US7332730B2Feb 19, 2008

Device and method for imaging a multiple particle beam on a substrate

LEICA MICROSYS LITHOGRAPHY LTD9 citations81

DOERING HANS-JOACHIM

1 patent

US8148702B2Apr 3, 2012

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

DOERING HANS-JOACHIM16 citations76