Inventor
RATH DAVID
US6 patents
⚠️ This page may combine multiple inventors who share the name “RATH DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INVENSYS SYS INC
2 patentsINFINEON TECHNOLOGIES CORP
2 patentsUS6295998B1Oct 2, 2001
Temperature controlled gassification of deionized water for megasonic cleaning of semiconductor wafers
INFINEON TECHNOLOGIES CORP25 citations92
US6167891B1Jan 2, 2001
Temperature controlled degassification of deionized water for megasonic cleaning of semiconductor wafers
INFINEON TECHNOLOGIES CORP35 citations92