Inventor
KULAS SCOTT
US3 patents
Patents
3 patentsUS7528937B1May 5, 2009
Dual-sided substrate measurement apparatus and methods
ULTRATECH INC14 citations87
US8017424B2Sep 13, 2011
Dual-sided substrate measurement apparatus and methods
ULTRATECH INC3 citations57
US7902040B1Mar 8, 2011
Dual-sided substrate measurement apparatus and methods
ULTRATECH INC0 citations46