P

Inventor

LEE YU-CHING

CN44 patents
⚠️ This page may combine multiple inventors who share the name “LEE YU-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

27 patents
US10658215B2May 19, 2020

Reticle transportation container

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10126644B2Nov 13, 2018

Pellicle for advanced lithography

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9933699B2Apr 3, 2018

Pellicle aging estimation and particle removal from pellicle via acoustic waves

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11837486B2Dec 5, 2023

Reticle transportation container

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11022889B2Jun 1, 2021

Overlay-shift measurement system and method for manufacturing semiconductor structure and measuring alignment mark of semiconductor structure

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US10962888B2Mar 30, 2021

Structures for acoustic wave overlay error determination using periodic structures

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10915017B2Feb 9, 2021

Multi-function overlay marks for reducing noise and extracting focus and critical dimension information

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10503082B2Dec 10, 2019

Optical reticle load port

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10777510B2Sep 15, 2020

Semiconductor device including dummy via anchored to dummy metal layer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12189304B2Jan 7, 2025

Method and structures for acoustic wave overlay error determination

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12055860B2Aug 6, 2024

Multi-function overlay marks for reducing noise and extracting focus and critical dimension information

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11835864B2Dec 5, 2023

Multi-function overlay marks for reducing noise and extracting focus and critical dimension information

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11768443B2Sep 26, 2023

Method for manufacturing semiconductor structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11448975B2Sep 20, 2022

Multi-function overlay marks for reducing noise and extracting focus and critical dimension information

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11378892B2Jul 5, 2022

Overlay-shift measurement system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11018037B2May 25, 2021

Optical reticle load port

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10998213B2May 4, 2021

Reticle transportation container

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12320782B2Jun 3, 2025

Acoustic measurement of fabrication equipment clearance

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11709153B2Jul 25, 2023

Acoustic measurement of fabrication equipment clearance

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11955441B2Apr 9, 2024

Interconnect structure and forming method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11302654B2Apr 12, 2022

Method of fabricating semiconductor device including dummy via anchored to dummy metal layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10691017B2Jun 23, 2020

Pellicle for advanced lithography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10845342B2Nov 24, 2020

Acoustic measurement of film thickness

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10794872B2Oct 6, 2020

Acoustic measurement of fabrication equipment clearance

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10031412B1Jul 24, 2018

Pellicle assembly in photolithography process and method for using the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9734271B2Aug 15, 2017

Method of determining galvanic corrosion and interconnect structure in a semiconductor device for prevention of galvanic corrosion

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US10497604B2Dec 3, 2019

Photomask transportation stage in semiconductor fabrication and method for using the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37

UNIV TAIPEI MEDICAL

4 patents

UNIV SOUTHERN TAIWAN SCI & TEC

3 patents

LEU SY-JYE

2 patents

ACCELSTOR INC

2 patents

ACADEMIA SINICA

2 patents

ELAN MICROELECTRONICS CORP

2 patents

CORETRONIC CORP

1 patent

CHIOU HANN-HUEI

1 patent