Inventor
MOON SUNG IN
US7 patents
⚠️ This page may combine multiple inventors who share the name “MOON SUNG IN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
5 patentsUS11610795B2Mar 21, 2023
Membrane diffuser for a substrate container
ENTEGRIS INC4 citations72
US8012586B2Sep 6, 2011
Diamond like carbon coating of substrate housings
ENTEGRIS INC6 citations72
US11901205B2Feb 13, 2024
Membrane diffuser for a substrate container
ENTEGRIS INC2 citations70
US8603632B2Dec 10, 2013
Diamond like carbon coating of substrate housings
ENTEGRIS INC1 citations61
US10175133B2Jan 8, 2019
Sensor with protective layer
ENTEGRIS INC0 citations51