Inventor

CHEN LEE-CHUN

TW2 patents

Patents

2 patents

US11726465B2Aug 15, 2023

Method for detecting environmental parameter in semiconductor fabrication facility

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55

US11493909B1Nov 8, 2022

Method for detecting environmental parameter in semiconductor fabrication facility

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations55