Inventor
CALLEGARI ALESSANDRO
US9 patents
⚠️ This page may combine multiple inventors who share the name “CALLEGARI ALESSANDRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS6448655B1Sep 10, 2002
Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation
IBM50 citations95
US6759321B2Jul 6, 2004
Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation
IBM24 citations92
US6974779B2Dec 13, 2005
Interfacial oxidation process for high-k gate dielectric process integration
IBM20 citations91
US8772116B2Jul 8, 2014
Dielectric equivalent thickness and capacitance scaling for semiconductor devices
IBM11 citations83
US7235440B2Jun 26, 2007
Formation of ultra-thin oxide layers by self-limiting interfacial oxidation
IBM5 citations59
US7202186B2Apr 10, 2007
Method of forming uniform ultra-thin oxynitride layers
IBM1 citations49