Inventor
DELGADO GILDARDO
US25 patents
⚠️ This page may combine multiple inventors who share the name “DELGADO GILDARDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
18 patentsUS9496425B2Nov 15, 2016
Back-illuminated sensor with boron layer
KLA TENCOR CORP29 citations93
US9263238B2Feb 16, 2016
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP10 citations84
US10446696B2Oct 15, 2019
Back-illuminated sensor with boron layer
KLA TENCOR CORP5 citations83
US10121914B2Nov 6, 2018
Back-illuminated sensor with boron layer
KLA TENCOR CORP9 citations83
US9818887B2Nov 14, 2017
Back-illuminated sensor with boron layer
KLA TENCOR CORP11 citations83
US9721761B2Aug 1, 2017
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP4 citations73
US9810991B2Nov 7, 2017
System and method for cleaning EUV optical elements
KLA TENCOR CORP5 citations72
US9188544B2Nov 17, 2015
Protective fluorine-doped silicon oxide film for optical components
KLA TENCOR CORP3 citations62
US10953441B2Mar 23, 2021
System and method for cleaning optical surfaces of an extreme ultraviolet optical system
KLA TENCOR CORP1 citations60
US10692692B2Jun 23, 2020
System and method for providing a clean environment in an electron-optical system
KLA TENCOR CORP1 citations59
US10714307B2Jul 14, 2020
Neutral atom imaging system
KLA TENCOR CORP0 citations52
US8790603B2Jul 29, 2014
Apparatus for purifying a controlled-pressure environment
KLA TENCOR CORP0 citations51
US9842724B2Dec 12, 2017
Method and system for imaging of a photomask through a pellicle
KLA TENCOR CORP1 citations48
US10840055B2Nov 17, 2020
System and method for photocathode illumination inspection
KLA TENCOR CORP0 citations46
US9662688B2May 30, 2017
Apparatus and method for cross-flow purge for optical components in a chamber
KLA TENCOR CORP1 citations46
US10096478B2Oct 9, 2018
System and method for rejuvenating an imaging sensor degraded by exposure to extreme ultraviolet or deep ultraviolet light
KLA TENCOR CORP0 citations41
US9277634B2Mar 1, 2016
Apparatus and method for multiplexed multiple discharge plasma produced sources
KLA TENCOR CORP0 citations41
US9874512B2Jan 23, 2018
Method and system for gas flow mitigation of molecular contamination of optics
KLA TENCOR CORP0 citations35
KLA CORP
4 patentsUS11715622B2Aug 1, 2023
Material recovery systems for optical components
KLA CORP0 citations55
US11262664B2Mar 1, 2022
System and method for protecting optics from vacuum ultraviolet light
KLA CORP0 citations54
US12510692B2Dec 30, 2025
Protection of optical materials of optical components from radiation degradation
KLA CORP0 citations53
US11543757B2Jan 3, 2023
System and method for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systems
KLA CORP0 citations43
DELGADO GILDARDO
3 patentsUS8414688B1Apr 9, 2013
Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping
DELGADO GILDARDO41 citations92
US9335279B2May 10, 2016
Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspection
DELGADO GILDARDO4 citations71
US9335637B2May 10, 2016
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
DELGADO GILDARDO1 citations50