Inventor
SUEYOSHI MAMORU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “SUEYOSHI MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS10032626B2Jul 24, 2018
Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC9 citations82
US6576063B2Jun 10, 2003
Apparatus and method for use in manufacturing a semiconductor device
HITACHI INT ELECTRIC INC8 citations73
US7033937B2Apr 25, 2006
Apparatus and method for use in manufacturing a semiconductor device
HITACHI INT ELECTRIC INC2 citations62