Inventor
SAWADA MOTOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SAWADA MOTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS10032626B2Jul 24, 2018
Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC9 citations82
US9869022B2Jan 16, 2018
Substrate processing apparatus
HITACHI INT ELECTRIC INC10 citations80
US9816183B2Nov 14, 2017
Substrate processing apparatus
HITACHI INT ELECTRIC INC5 citations71